概述

AVI-400M Isolators and Controller

The AVI-400 platforms provide industry-leading active vibration isolation performance (starting at 0.5 Hz) for electron microscopes and similarly large research instruments. The AVI-400 platforms help users achieve more from their microscopes by removing disruptive low frequency vibration noise from affecting their measurements. The AVI-400 platforms incorporate a low-profile and modular design, simplifying the installation process by not requiring lifting equipment for installation for a majority of instruments (including most SEMs).

AVI-400有三种标准尺寸:AVI-400S,AVI-400M, andAVI-400XL。


应用

The AVI-400 platforms support a wide range of high-load microscopes and other research instruments sensitive to low-frequency vibration noise. The most common application for the AVI-400 platforms is electron microscopy, where they have supported both scanning electron microscopes and transmission electron microscopes with great success. End users and OEMs around the world find the low-profile nature of the AVI-400 platforms favorable versus competing solutions as it simplifies the installation process and removes the need for persistent maintenance.

In addition to SEMs and TEMs, the AVI-400 platforms often support:

  • Ultra-High Vacuum Scanning Probe Microscopes (UHV-SPM)
  • Lithography tools
  • High precision metrology tools
  • 光谱分析仪器
  • And More!

Performance

Click to Expand
Click to Expand

传递率图表示AVI-400系列在频域上的隔振性能。性能数据代表所有旋转振动模式(所有六个自由度),应作为客户在将其仪器与AVI-400平台配对时可获得的性能保守估计。

Performance Upgrade – LFS System

The AVI-400 Series can improve its low-frequency vibration isolation performance by pairing it with the LFS System (Low Frequency Sensor). This upgrade enables the platform to isolate vibrations starting at 0.5 Hz and can be easily retrofitted for existing systems in the field. More details on the upgraded performance can be found below.


Performance Comparison Images

两位研究人员在两种情况下操作不同的sem成像:没有隔振系统和AVI-400M平台。结果表明,当使用AVI平台支持SEM时,图像质量和整体测量清晰度有了显著改善。


Technical Specifications


AVI-400系列下载


三维模型